发明名称 |
METALORGANIC CHEMICAL VAPOR DEPOSITION OF ZINC OXIDE |
摘要 |
<p>A method of metalorganic chemical vapor deposition includes converting a condensed matter source to provide a first gas, the source including at least one element selected from the group consisting of gold, silver and potassium. The method further includes providing a second gas comprising zinc and a third gas comprising oxygen, transporting the first gas, the second gas, and the third gas to a substrate, and forming a p-type zinc-oxide based semiconductor layer on the substrate.</p> |
申请公布号 |
WO2009131842(A1) |
申请公布日期 |
2009.10.29 |
申请号 |
WO2009US40037 |
申请日期 |
2009.04.09 |
申请人 |
LUMENZ, INC.;ADEKORE, BUNMI, T.;PIERCE, JONATHAN |
发明人 |
ADEKORE, BUNMI, T.;PIERCE, JONATHAN |
分类号 |
C23C16/00;C23C16/22 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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