发明名称 Probe microscope and measuring method using probe microscope
摘要 Provided is a probe microscope for measuring a surface potential of a sample, including a contact electrification mechanism (circuit (C)) for bringing an electroconductive probe device into contact with a surface of the sample and applying a voltage in the contact state to induce electrification on the surface of the sample, and a potential measuring mechanism (circuit (K)) for measuring the surface potential of the sample caused by the contact electrification mechanism in a non-contact state of the electroconductive probe device and the surface of the sample, wherein the electrification induced by the contact electrification mechanism and the measurement of the surface potential by the potential measuring mechanism alternate in time series while the voltage applied during the contact is gradually changed, thereby measuring a correlation between the applied voltage and the surface potential.
申请公布号 US7609048(B2) 申请公布日期 2009.10.27
申请号 US20070797116 申请日期 2007.05.01
申请人 CANON KABUSHIKI KAISHA 发明人 KUSAKA TAKAO
分类号 G01Q70/12;G01R31/02;G01Q10/06;G01Q30/04;G01Q60/00;G01Q60/24;G01Q60/30;G01Q60/40 主分类号 G01Q70/12
代理机构 代理人
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