| 摘要 |
A Pirani vacuum gauge in which dependency of temperature of a filament on variation of gas pressure is raised and the gas pressure can be measured with high accuracy. The Pirani vacuum gauge includes a cylindrical body 2 in which the interior communicates with a space to be measured for pressure; a filament 1 enclosed in the cylindrical body 2; and a pipe 7 surrounding the filament 1 in the cylindrical body, the least distance between the facing inner walls of the pipe being equal to less than 6 mm and the pipe 7 covering more than 80% of the length of the filament 1.
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