发明名称 Charged particle beam drawing apparatus
摘要 In the present invention, vector data developing unit, ends separating unit, overlap removing unit and bitmapped data generating unit are sequentially connected in order to make pipeline processing. In addition, data of each raster is orderly arranged as a unit so that each processor can process data of each raster at a time. Each processor can make the pipeline processing to fast generate data. In addition, small-scale circuits can be used to realize the system because each raster can be processed as a unit of processing. Moreover, since data is orderly arranged before being processed, multi-valued bitmapped data can be generated in the order of drawing. Therefore, the drawing operation and data generating operation can be performed in parallel without use of any large-scale storage device.
申请公布号 US7608844(B2) 申请公布日期 2009.10.27
申请号 US20050136703 申请日期 2005.05.25
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION;CANON INC. 发明人 INOUE YUJI;YODA HARUO;ANDO KIMIAKI;YUI YOSHIKIYO
分类号 G21K5/10;H01L21/027;G21K1/08;H01J37/302 主分类号 G21K5/10
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