| 摘要 |
In a temperature control device, a plurality of screening cylinders each having a different diameter are concentrically arranged within a liquid tank to concentrically form a plurality of layered channels which are communicated to define a circulation passage through which constant-temperature fluid flows. A heat transfer tube through which liquid chemical flows is disposed in any one of the channels such that heat exchange between the liquid chemical and the constant-temperature fluid is performed via the heat transfer tube for controlling temperatures of the liquid chemical.
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