| 摘要 |
A composite valve includes a main valve unit that individually opens and closes a vacuum channel for applying vacuum pressure to a load and a pressure channel for supplying vacuum-breaking pressure fluid with two valves for vacuuming and pressurizing; a channel combining section that connects the vacuum channel and the pressure channel to the load via a combining port; and a pilot valve unit that opens and closes the valve members individually with two pilot valves. The main valve unit, the channel combining section, and the pilot valve unit have the same width, and connect to one another in line along the axis of the valve.
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