发明名称 Slot waveguide structure
摘要 A nanometer slot waveguide includes a nanometer slot waveguide structure with vertically stacked layers. The vertically stacked layers include a substrate, a first waveguide layer defining a first rail, a spacer layer defining a slot, and a second waveguide layer defining a second rail.
申请公布号 US7609932(B1) 申请公布日期 2009.10.27
申请号 US20060481687 申请日期 2006.07.06
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. 发明人 SPILLANE SEAN
分类号 G02B6/10;H01L21/00 主分类号 G02B6/10
代理机构 代理人
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