发明名称 MOISTURE REMOVAL DEVICE OF FLEXIBLE POLYMER SUBSTRATE
摘要 PURPOSE: A moisture removal device of flexible polymer substrate is provided to rapidly dry a substrate without damage by drying and heating the substrate during the delivery by the transferring roller. CONSTITUTION: A moisture removal device of flexible polymer substrate includes a chamber(100), an open and close frame(200), a vacuum pump, an unwinding roller(400), an unwinding motor, an unwinding transferring guide roller(600), a main heating and drying unit(700), a cooling drum(800), a drum rotation motor, a coiling transferring guide roller(1000), the secondary heating and drying unit(1100), a winding roller(1200), and a reel motor. The one-side part of chamber of a barrel shape is opened. The vacuum pump is connected with the chamber to make the inside of chamber vacuum. A flexible polymer substrate is installed at the open and close frame. The unwinding motor is connected with the unwinding roller to rotate. The main heating and drying unit dries the flexible polymer substrate with radiant heat generated from infrared lamp.
申请公布号 KR20090111467(A) 申请公布日期 2009.10.27
申请号 KR20080037098 申请日期 2008.04.22
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 JE, TAE JIN;CHOI, DOO SUN;WHANG, KYUNG HYUN;YOO, YEONG EUN;BAE, JONG OH;PARK, JAE SOUNG
分类号 H01L21/304 主分类号 H01L21/304
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