发明名称 |
FABRICATION METHOD OF HIGH ASPECT RATIO NANO/MICRO PATTERNS BY VIBRATION-ASSISTED FILLING PROCESS |
摘要 |
<p>PURPOSE: A method for manufacturing a high aspect ratio micro/nano pattern is provided to effectively fill a resin by activating an interfacial property of the resin and a mold. CONSTITUTION: A pattern material of liquid state is filled with vibration on a part(431) in which a pattern of a mold(430) is formed. The mold in which the pattern material of the liquid state is filled is compressed with a substrate. The pattern material of the liquid state is hardened. In the filling step, a coater in which a vibrator for giving vibration to a top part is installed is used. The coater is one of a blade coater, a slit coater, and a roll coater.</p> |
申请公布号 |
KR20090111014(A) |
申请公布日期 |
2009.10.26 |
申请号 |
KR20080036558 |
申请日期 |
2008.04.21 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
YANG, DONG YOL;RYU, SEUNG MIN |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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