TRANSFER SYSTEM AND TRANSFER METHOD FOR SUBSTRATE

摘要

PURPOSE: A substrate feeding system and a substrate feeding method are provided to reduce the manufacturing cost regardless of the size of substrate. CONSTITUTION: A substrate feeding method of substrate feeding system includes the awareness step, the decision step, and the moving step. The awareness step recognizes the size of the substrate to transfer by the identification unit. The decision step determines whether the state of the X-axis guide rod(211,212) and the Y-axis guide rod(221,222) mounted in the adsorption unit is copes with the size of the substrate at the awareness step. The moving step moves each of the X-axis guide rod and Y-axis guide rod to the X-axis or the Y-axis.