| 摘要 |
Provided are a sputtering target material by which generation of arcing can be surely reduced and generation of breakage and cracks is suppressed, and a sputtering target obtained by using the sputtering target material. The substantially board-like sputtering target material has a rectangular sputtering surface, rectangular side surfaces and a rectangular bonding surface. A corner section, which is formed by having at least three surfaces abut to each other among a plurality of surfaces constituting the sputtering target material, is chamfered.
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