| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a multilayered polyimide film for preventing a thickness variation of the surface layer from being generated by finding out the early stage generation of the thickness variation of the surface layer of the film in the middle of manufacturing, and controlling the amount of the extrusion of a polyimide precursor solution of the surface layer so as to make it uniform when pushing out the polyimide precursor solution for the substrate layer and the surface layer to a supporting body from a multi-layer dies by utilizing a result which is founded. SOLUTION: In the method for forming the multilayered polyimide film, the thickness variation of the surface layer of the film in the middle of manufacturing is measured by a method selected from the Schlieren method and the shadow graph method, and the amount of the extrusion of the polyimide precursor solution in the surface layer is controlled so as to be uniform. COPYRIGHT: (C)2010,JPO&INPIT |
