| 摘要 |
PROBLEM TO BE SOLVED: To obtain a wavefront sensor which is capable of measuring the spacial phase distribution of a reflected wavefront by a spacial phase distribution control device having a structure wherein segment reflective elements conducting a piston drive are arranged like an array. SOLUTION: The wavefront sensor is equipped with condenser lens systems 4 and 5 which condense light waves reflected by a micromirror array 2, a two-dimensional detector 6 which detects the intensity distribution of a condensed spot image and a signal processing part 7 which computes a two-dimensional map of the light waves. The condenser lens systems 4 and 5 have a first lenslet array 4 which condenses light waves of segment wavefronts adjacent in a first direction and a second lenslet array 5 which condenses the light waves of segment wavefronts adjacent in a second direction. The signal processing part 7 computes a piston phase difference between the adjacent segment wavefronts by utilizing a change in the intensity distribution of the condensed spot image condensed by the first lenslet array 4 and the second lenslet array 5, and computes the two-dimensional map from the piston phase difference. COPYRIGHT: (C)2010,JPO&INPIT
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