| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic array sensor for underwater use by heightening durability (water-proofing/pressure-resisting property) of a piezoelectric thin film sensor. Ž<P>SOLUTION: In this ultrasonic array sensor 1 comprising a plurality of piezoelectric transducers disposed in an array shape on a diaphragm structure, a fringe of the ultrasonic array sensor is protected by resin mold molding. A conduction hole 32 to be conducted to a back space 30 of the ultrasonic array sensor 1 is provided in a part of the ultrasonic array sensor 1. Otherwise, slightly-compressible liquid such as oil or water is enclosed in the back space 30 of the ultrasonic array sensor 1. Otherwise, a resin is filled into the back space 30 of the ultrasonic array sensor 1. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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