| 发明名称 |
FOCUS SENSOR, INSPECTION APPARATUS, LITHOGRAPHIC APPARATUS AND CONTROL SYSTEM |
| 摘要 |
<p>A focus sensor comprises a confocal sensor. Within the confocal sensor there are a plurality of aperture plates positioned in front of a plurality of detectors. Rather than a conventional pinhole aperture shape there is a central aperture surrounded by a plurality of outer aperture portions.</p> |
| 申请公布号 |
WO2009127322(A1) |
申请公布日期 |
2009.10.22 |
| 申请号 |
WO2009EP02301 |
申请日期 |
2009.03.30 |
| 申请人 |
ASML NETHERLANDS B.V.;SINKE, ARNOLD;VAN BOXMEER, JOHAN MARIA |
发明人 |
SINKE, ARNOLD;VAN BOXMEER, JOHAN MARIA |
| 分类号 |
G03F9/00 |
主分类号 |
G03F9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
