| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To continue control without stopping this system when flow rate control is not available by automatically shifting the flow rate control to opening control. <P>SOLUTION: The normality/abnormality of the actual flow rate QR of fluid to be measured by an actual flow rate measurement part 25B is determined by an actual flow rate normality/abnormality determination part 25C. When it is determined that the actual flow rate QR is abnormal by the actual flow rate normality/abnormality determination part 25C, the connection mode of a mode changeover switch SW1 of a control mode switching part 25D is switched, and a mode (flow rate control mode) for selectively outputting the actual flow rate QR from the actual flow rate measurement part 25B to a valve control part 25A is switched to a mode (opening control mode) for selectively outputting actual openingθpv from a valve opening detector 16 to the valve control part 25A. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
