APPARATUS FOR MEASURING PRESSURE BY USING DIAPHRAGM AND METHOD OF PRESSURE MEASUREMENT BY USING DIAPHRAGM

摘要

PURPOSE: An apparatus for measuring pressure using diaphragm and a method for measuring pressure using the same are provided to measure pressure below atmospheric pressure without a getter pump by fixing a pressure variable container on a sensor housing in which a diaphragm is installed inside. CONSTITUTION: An apparatus for measuring pressure using diaphragm comprises a diaphragm sensor and a pressure variable container. The diaphragm sensor includes a sensor housing, a diaphragm, an electrode substrate, and an electrode. A first opening(12-1) and a second opening(12-2) are formed in the sensor housing(12). The diaphragm(16) is installed between the first opening and the second opening. The electrode substrate(14) is installed between the second opening and the diaphragm. The electrode(14T) adheres to the electrode substrate to be faced to the diaphragm. A third opening and a fourth opening are formed in the pressure variable container.