| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for embedding a metallic material in a trench or a hole having a fine opening and a high aspect ratio. SOLUTION: In a coaxial vacuum arc vapor deposition source 1, a cylindrical trigger electrode 13 and a cylindrical cathode electrode 12 having an evaporation material member 12a are arranged in a coaxially adjacently fixed state via a cylindrical electrical porcelain 15, and an anode electrode 11 is coaxially arranged around and apart from the cathode electrode. The coaxial vacuum arc vapor deposition source 1 is used to generate trigger discharge between the trigger electrode and the cathode electrode to intermittently induce arc discharge between the cathode electrode and the anode electrode to allow release of charged particles produced from the evaporation material member in a vacuum chamber to embed a metallic material in a trench or a hole. COPYRIGHT: (C)2010,JPO&INPIT
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