| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage-positioning device that can accurately position a stage in a target position and makes it possible to reduce residual vibration, at the finishing of positioning. SOLUTION: Items from a motor driving means to a laser length measuring instrument that the outputs the position of a stage are considered to be one controlled object that outputs a position from a speed command input. A speed command is input to this controlled object, to obtain the frequency characteristics of the controlled object. The natural frequency of the stage and a frequency band to be removed are determined from the obtained frequency characteristics and a speed command filter is set. During normal driving of the stage, a first speed command is computed by a control unit, by using the difference between the present position of the stage and a target position command. A second speed command obtained by removing a specific frequency band is computed, by passing the first speed command through the speed command filter. The second speed command is input to the controlled object. COPYRIGHT: (C)2010,JPO&INPIT |
