| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that a region capable of outputting a desirable progressive-wave power cannot be expanded in a conventional high-frequency power source 6, because a DC-voltage setting value Vset is not appropriate. <P>SOLUTION: A DC-power outputting unit 10 supplying a DC power to a high-frequency power outputting unit 20 is constituted of a target-voltage setting unit 11, a DC-power controller 12, a DC power source 13, a DC detector 14, and a reflectivity-coefficient processor 15. The target-voltage setting unit 11 memorizes the corresponding relation of the reflectivity coefficient to a voltage value, and at the same time sets the voltage value corresponding to the reflectivity coefficient processed by the reflectivity-coefficient processor as a target-voltage value, to output a target-voltage signal Tdc corresponding to the target-voltage value. Further, the DC-power controller 12 controls the output voltage value of the DC power source 13 so as to make the voltage value corresponding to the DC-voltage detecting signal Vdc equal to the voltage value corresponding to the target-voltage signal Tdc. <P>COPYRIGHT: (C)2010,JPO&INPIT |
