发明名称 FLUID INCLUSION PREVENTION DEVICE, ATMOSPHERE TREATMENT DEVICE, ATMOSPHERE TREATMENT METHOD AND GUIDE MEMBER
摘要 <P>PROBLEM TO BE SOLVED: To provide a fluid inclusion prevention device having an inexpensive and simple structure compared to conventional devices and preventing inclusion of two types of fluids within a tube in the other. Ž<P>SOLUTION: A third component fluid introduction port 4 for introducing inert gas to form a gas curtain is provided on a wall face of the tube 15b of the fluid inclusion prevention device 14, and a third component fluid discharge port 5 for discharging inert gas is provided on the opposing face to the third component fluid introduction port 4. A fluid barrier 6 is provided around the third component fluid introduction port 4, and a third component fluid supply hole 13 is formed on the fluid barrier 6. Thus, due to the structure in which the fluid barrier 6 is provided around the third component fluid introduction port 4, the fluid barrier 6 also prevents inflow of first component fluid 16 and second component fluid 17 to the other. As a result, the amount of the inert gas is reduced compared to conventional cases. Moreover, since the fluid barrier 6 has a straightening action, generation of turbulence is prevented as much as possible. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009243809(A) 申请公布日期 2009.10.22
申请号 JP20080092414 申请日期 2008.03.31
申请人 ALLIED MATERIAL CORP 发明人 HOTTA HIDEKAZU
分类号 F27D7/06;C21D1/74;F27B5/10;F27B5/16;F27B9/28 主分类号 F27D7/06
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