| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrolytic cleaning device and an electrolytic cleaning method which can extend the service life of an electrolytic cleaning liquid without degrading a cleaning effect. Ž<P>SOLUTION: The electrolytic cleaning device 1 and the electrolytic cleaning method comprise immersing an anode 10 and a cathode 20 holding a cleaning object M in an electrolytic cleaning liquid and applying a current between the anode 10 and the cathode 20 to subject the cleaning object to electrolytic cleaning. The anode 10 comprises a plurality of anode sections 11 that can be energized by different currents with respect to the cathode 20, and is controlled in such a manner that a current applied to an anode section 11A, which is a part of the plurality of anode sections 11, with respect to the cathode 20 is alternately switched between a larger amount and a smaller amount compared to a current applied to another anode section 11B with respect to the cathode 20. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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