TRANSFER APPARATUS AND TRANSFER METHOD

摘要

<P>PROBLEM TO BE SOLVED: To provide a transfer apparatus and a transfer method capable of reducing a force required for the exfoliation of a transfer surface from a member having ruggedness, and forming the accurate transfer surface. Ž<P>SOLUTION: The transfer apparatus includes: an application part 1 for applying resin to a substrate P1; a sticking part 3 for sticking a surface of the substrate P1 coated with the resin together with a rugged surface of a stamper S; a hardening part 4 for hardening the resin; and an exfoliation part 5 for exfoliating the stamper S and the substrate P1. The application part 1 includes a feeding section 13 for feeding resin A and resin B to different positions multiple times on the substrate P1 so that the substrate P1 is coated with the resin A and the resin B and the area of a layer of the resin B to which ruggedness is transferred becomes smaller than the area of a layer of the resin A. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž