| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical sensor device which can reliably detect the presence or absence of foreign matters, or the like, even when the sizes of the foreign matters need to be detected are reduced. SOLUTION: The optical sensor device includes a projector projecting detection light on a workpiece as an object to be inspected, such as a glass substrate or the like, a light receiver receiving the detection light, and a signal processing device determining the presence or absence of the foreign matters on the workpiece by performing signal processing for the output of the light receiver. On a detection surface 4A on which a CCD of the light receiver is disposed, a part of the effective imaging region of the CCD is regarded as a measurement region 40. The measurement region 40 is divided into two or more divisions 41-44 in a direction perpendicular to the top surface of the workpiece, and the presence or absence of the foreign matters is determined by measuring respective receiving light amounts of the divisions 41-44. COPYRIGHT: (C)2010,JPO&INPIT |
