MEASURING APPARATUS HAVING NANOTUBE PROBE

摘要

PROBLEM TO BE SOLVED: To improve the electric conductivity of a nanotube probe by reducing the electric resistance of a carbon nanotube and further the electric resistance between a metal substrate and the carbon nanotube, achieve uniform diameters, and improve the measuring accuracy of a measuring apparatus in measuring apparatuses such as an electric conductivity characteristics evaluation apparatus and a probe microscope using a nanotube as a probe. SOLUTION: The electric conductivity characteristics evaluation apparatus has the nanotube probe using a means such as the application of a metal coating after covering the surface of a nanotube with a graphene sheet small piece to improve the wettability of metal. The electric conductivity characteristics evaluation apparatus alternately has a nanotube probe in which a metal coating is applied to an amorphous nanotube made of a graphene sheet. COPYRIGHT: (C)2010,JPO&INPIT