| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a detector capable of carrying out differentiation of a reflected electrons and transmission electrons with more superior precision, and detection responding to the necessity of an observer. Ž<P>SOLUTION: By using a CCD type detector composed of a CCD element in which a scintillator is closely fixed as the detector, a reflected electron image or a transmission electron image is obtained by following means. In order to obtain the reflected electron image, this detector is arranged directly under an object lens. When an electron beam is irradiated on one point of a sample, the reflected electrons or the transmission electrons generated from the sample are collided with the scintillator, and a light-emitting pattern is formed. This pattern is detected by the CCD type detector, and memorized in a memory. By repeating this treatment sequentially at respective irradiation positions, the whole pattern of an electron beam scanning range is obtained. To this pattern, a calculation treatment is carried out, and the pattern is converted into an image. Normally, image data of one pixel share is calculated from one pattern. By repeating this sequentially, the reflected electron image or the transmission electron image of the electron beam scanning range can be obtained. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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