| 发明名称 |
APPARATUS AND METHOD FOR INNER SURFACE TREATMENT OF HOLLOW BODIES |
| 摘要 |
Apparatus and method for surface treatment of inner surfaces of hollow bodies, in particular of tubes, by means of a plasma. In this case, the apparatus comprises at least one linear plasma source, which is located within the hollow body. |
| 申请公布号 |
WO2009127294(A1) |
申请公布日期 |
2009.10.22 |
| 申请号 |
WO2009EP01471 |
申请日期 |
2009.03.02 |
| 申请人 |
IPLAS INNOVATIVE PLASMA SYSTEMS GMBH;SPITZL, RALF |
发明人 |
SPITZL, RALF |
| 分类号 |
H01J37/32;A61L2/12;A61L2/14;C23C16/50 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
