摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor for accurately measuring leakage early by directly disposing the sensor at a location at which the leakage of a hydrogen gas is predicted. <P>SOLUTION: The hydrogen gas sensor is provided with a sensor structure 14 comprising first and second electrodes 16, 18 formed of different materials, and an electrolyte 20 contacting the electrodes, and detects the hydrogen gas based on an electromotive force generated between the electrodes by contacting with the hydrogen gas. The sensor structure 14 is deposited at a location adjacent to a through-hole 12 at a substrate 10 having a plurality of the through-holes 12. <P>COPYRIGHT: (C)2010,JPO&INPIT |