| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin and lightweight vacuum suction apparatus for conveyance which exhibits excellent suction performance without causing any problem by static electricity. SOLUTION: A vacuum suction apparatus includes a mounting portion consisting of a ceramic porous material and having a surface for mounting a substrate, a substantially recessed supporting portion consisting of a ceramic-reinforced metal based composite material or silicon carbide and surrounding the mounting portion, an adhesive layer for pasting the mounting portion and the supporting portion, wherein the adhesive layer consists of a binder and a conductive filler, the content of conductive filler of the adhesive is 50-80 mass%, and the mean particle size of the conductive filler is smaller than one half of the average pore diameter of the ceramic porous material. COPYRIGHT: (C)2010,JPO&INPIT |
