摘要 |
<P>PROBLEM TO BE SOLVED: To form a highly reliable perovskite structure oxide layer having higher orientation at the plane (111) without providing an intermediate layer between a metal layer and an oxide layer. <P>SOLUTION: The producing method of an oxide layer includes the steps of forming, on a metal layer 14, a precursor layer 20A of the ABO<SB>3</SB>type perovskite structure oxide containing Ba in the A site and Ti in the B site, forming an oxide layer 20B by heating the precursor layer 20A of the oxide, radiating the laser beam to the oxide layer 20B under the conditions that the oxide is never crystallized, and crystallizing the layer irradiated with the laser beam through a heating process. <P>COPYRIGHT: (C)2010,JPO&INPIT |