发明名称 PRODUCING METHOD OF PEROVSKITE STRUCTURE OXIDE
摘要 <P>PROBLEM TO BE SOLVED: To form a highly reliable perovskite structure oxide layer having higher orientation at the plane (111) without providing an intermediate layer between a metal layer and an oxide layer. <P>SOLUTION: The producing method of an oxide layer includes the steps of forming, on a metal layer 14, a precursor layer 20A of the ABO<SB>3</SB>type perovskite structure oxide containing Ba in the A site and Ti in the B site, forming an oxide layer 20B by heating the precursor layer 20A of the oxide, radiating the laser beam to the oxide layer 20B under the conditions that the oxide is never crystallized, and crystallizing the layer irradiated with the laser beam through a heating process. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009246242(A) 申请公布日期 2009.10.22
申请号 JP20080092949 申请日期 2008.03.31
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY;TDK CORP 发明人 TSUCHIYA TETSUO;MIYAMOTO YUKI
分类号 H01G4/33;C04B35/46 主分类号 H01G4/33
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