| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lead-free ceramic powder which, when a piezoelectric film is formed by an AD method, achieves sufficiently high piezoelectric property without heating a substrate, a method for producing the ceramic powder, and a piezoelectric element including a piezoelectric film formed from the ceramic powder. <P>SOLUTION: The ceramic powder for aerosol deposition consists primarily of a compound not containing lead as a constituent element, wherein the ceramic powder has an average particle size of 0.6-1.7μm and a lattice strain of≤0.3. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
