| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus effectively suppressing the error between a position of a laser spot and a machining target position. <P>SOLUTION: The laser beam machining apparatus M includes an allocation section which allocates the machining target position on a machining region to a coordinate position of a coordinate system, and a correction section which, when a designated coordinate position is allocated as the machining target position, suppresses the error between the position of the laser spot and the machining target position by correcting the turning position of a galvanometer mirror based on correction data made to correspond to the designated coordinate position. The spacing between the designated coordinate positions Q, Q made to correspond to the correction data for suppressing the error between the position of the laser spot S and the machining target position is narrower in the region farther from a reference position O than the region nearer the reference position within the coordinate system. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
