LIGHT MODULATOR AND MANUFACTURING METHOD THEREOF, AND OPTICAL INTEGRATING ELEMENT AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To prevent increase of the number of production processes in a light modulator having a semi-insulating clad layer.

SOLUTION: The light modulator is equipped with: an incidence end face 511 receiving incident light; an i-InGaAsP optical waveguide layer 503 propagating the incident light; a pair of electrodes applying an electric field to the i-InGaAsP optical waveguide layer 503; an emission end face 512 emitting light modulated by the applied electric field; an n-InP buffer layer 502 covering a lower face of the i-InGaAsP optical waveguide layer 503; and an n-InP layer 507 provided on the i-InGaAsP optical waveguide layer 503. An SI-InP layer 506 is provided, covering a top face of the i-InGaAsP optical waveguide layer 503 and a side face of the i-InGaAsP optical waveguide layer 503.

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