| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light wave interference measuring method capable of easily and inexpensively measuring the surface shape of an aspherical optical element in a short time. Ž<P>SOLUTION: Each light flux from a light source 11 which is halved by a transmission/reflection splitting surface 13a is coupled again by respective corresponding spherical reference lenses 15, 25 in the carrying state of wavefront information corresponding to each surface shape of an inspection aspherical lens 17 and a reference aspherical lens 27, and a wavefront error of the inspection aspherical lens 17 to the reference aspherical lens 27 is formed on an imaging surface of an interferometer CCD camera 31 as interference fringe information. A deformable mirror 42 for correcting the wavefront shape of incident second parallel light fluxes (correcting the wavefront information of the reference aspherical lens 27) is provided between a beam splitter 13 and a high-NA spherical reference lens 25, and the corrected value is controlled by a control operation part 51. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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