发明名称 SPECTROSCOPIC DEVICE AND SPECTRAL CONFOCAL MICROSCOPE
摘要 <P>PROBLEM TO BE SOLVED: To provide a spectroscopic device which prevents an exciting laser beam and its diffracted light from coming into a detector, by adding a simple function. Ž<P>SOLUTION: The position on the detector at which secondary diffracted light comes into the detector is calculated. When the secondary diffracted light L2' comes into the detector, a CPU adjusts the angle of diffraction grating to prevent the secondary diffracted light L2' from coming into the detector. Having done so, the position on the detector at which primary diffracted light L2 that is made incident on the detector is calculated, and the place is blocked by a shielding plate 404. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009244156(A) 申请公布日期 2009.10.22
申请号 JP20080092274 申请日期 2008.03.31
申请人 NIKON CORP 发明人 SHOJI YUICHI
分类号 G01J3/02;G02B21/00 主分类号 G01J3/02
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