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发明名称
COMBINED ETCHING AND DOPING SUBSTANCES
摘要
申请公布号
KR100923040(B1)
申请公布日期
2009.10.22
申请号
KR20047005301
申请日期
2004.04.09
申请人
发明人
分类号
H01L21/306;H01L31/042;C09K13/04;H01L21/311;H01L31/0216;H01L31/04
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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