| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card that has good connection stability between inspection electrodes and electrodes to be inspected even after being exposed to high temperatures due to a burn-in test, and that can prevent displacement in contact between the inspection electrodes and a conductive part and in contact between the conductive part and probe contact needle or the electrodes to be inspected even after repeated use. SOLUTION: The probe card includes an inspection circuit board that has the inspection electrodes formed so as to correspond to the electrodes to be inspected; and an anisotropically conductive member that electrically connects the electrodes to be inspected with the inspection electrodes. The inspection electrodes are provided so that at least chips thereof protrude from a surface of the test circuit board. The anisotropically conductive member has a plurality of conductive paths formed of conductive members that penetrate an insulating base material, which includes an anodic oxide film of an aluminum substrate with micropores, in a thickness direction in a manner such that the conductive paths are insulated from one another. COPYRIGHT: (C)2010,JPO&INPIT
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