| 摘要 |
PROBLEM TO BE SOLVED: To prevent gas existing on the discharge side from being carried back to the supply port side by being filled in a transfer division between blades for forming a rotor in a discharge process, in a rotary valve. SOLUTION: This rotary valve 17 is composed of a casing 17A having a cylindrical part 17j, a supply port 17b and a discharge port 17c and a rotary body 17D supported by a support shaft 17E, and forms carrying divisionsα-δbetween the blades 17o radially extended from a boss part 17n of the rotary body. A flexible film 17F is covered in a nonadhesive state by covering an inner surface of the carrying divisionsα-δ. Pressurization or decompressing is made to act on a back face of this flexible film 17F via the support shaft 17E, and the volume of the carrying divisionsα-δis optionally changed by the flexible film 17F. COPYRIGHT: (C)2010,JPO&INPIT
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