WINDING VACUUM FILM COATING APPARATUS

摘要

[PROBLEMS] To provide a winding vacuum film coating apparatus in which a heat deformation of a base material caused by leakage charged particles from a neutralization unit can be avoided without increasing the size of the apparatus. [MEANS FOR SOLVING PROBLEMS] A winding vacuum film coating (deposition) apparatus (10) according to the present invention comprises a charge capture body (25) for capturing a charged particle going from a neutralization unit (23) to a can roller (14) between the can roller (14) for cooling and the neutralization unit (23). Thereby, it is prevented that charged particles leaked from the neutralization unit (23) reaches the can roller (14), fluctuation of the bias potential applied to the can roller (14) for close contact with the base material is suppressed, and an electrostatic force exerted on the base material (12) is held stable. Therefore, because the close contact force between the base material (12) and the can roller (14) is held stable, heat deformation of the base material (12) can be avoided.