| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element part. <P>SOLUTION: The angular velocity sensor element 1 according to the present embodiment, comprises sensor units 10a to 10c equipped with driven-related and detection-related vibration arms, a base part 4 which couples the sensor units 10a to 10c, a first fixed part 6 which is frame-shaped and which surrounds the base part 4 and the sensor units 10a to 10c, first coupling arms 5a to 5c which couple the base part 4 to the first fixed part 6, a second fixed part 8 which is disposed in at least a part of the area around the first fixed part 6, and second coupling arms 7a to 7c which couple the first fixed part 6 to the second fixed part 8. <P>COPYRIGHT: (C)2010,JPO&INPIT |
