发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a dynamic random access memory which operates at a high speed by reducing the capacity of a bit line. Ž<P>SOLUTION: On a first conductive layer 6 which serves as one of source and drain regions, a first semiconductor layer 11, a channel semiconductor layer 12, and a second conductive layer 13 which serves as the other of the source and drain regions and also as a storage node 26 are provided. On the second conductive layer 13, a capacitor insulating film 21 is provided. A cell plate 22 is provided on the storage node 26 with the capacitor insulating film 21 interposed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009246383(A) 申请公布日期 2009.10.22
申请号 JP20090168834 申请日期 2009.07.17
申请人 RENESAS TECHNOLOGY CORP 发明人 MAEDA SHIGENOBU;INOUE YASUAKI;KURIYAMA SACHITADA;MAEKAWA SHIGETO;KANEMOTO KYOZO;IWAMATSU TOSHIAKI
分类号 H01L29/786;H01L21/8234;H01L21/8242;H01L27/06;H01L27/088;H01L27/108;H01L29/78 主分类号 H01L29/786
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