| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide element capable of reducing a driving voltage Vπ, preventing light loss and achieving impedance matching even when the thickness of a substrate having an electro-optical effect is≤15μm. SOLUTION: The optical waveguide element includes: the substrate 1 composed of a material having the electro-optical effect and having thickness of≤15μm; an optical waveguide 2 formed by doping a high refractive index material from the surface of the substrate into the substrate; and a control electrode for modulating and controlling an optical wave propagated through the optical waveguide. The control electrode is composed of a signal electrode 3 and a ground electrode 4 which are arranged through the optical waveguide and a rate W/G of the width W of the signal electrode to a gap G between the signal electrode and the ground electrode is≤0.7. COPYRIGHT: (C)2010,JPO&INPIT |
