,申请号JP20090510177-传众专利搜索

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发明名称
摘要
申请公布号	JP2009536987(A)	申请公布日期	2009.10.22
申请号	JP20090510177	申请日期	2007.05.10
申请人		发明人
分类号	C23C18/48;H01L21/288	主分类号	C23C18/48
代理机构		代理人
主权项
地址

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