METHOD OF GROWING ALN CRYSTALS, AND ALN LAMINATE

摘要

Provided are a method of growing AlN crystals in which AlN of good crystallinity is grown, and AlN laminates. The method of growing AlN crystals includes the following processes. Firstly a raw material (17) including AlN is prepared. A substrate (11) of a different type having a main surface (11a) is prepared. A first layer (12) having a flat surface (12a) is formed by subliming the raw material (17) and growing an AlN crystal covering the main surface (11a) of the substrate (11) of a different type. The raw material (17) is sublimed and a second layer (13) comprising AlN is formed on the surface (12a) of the first layer (12). The second layer (13) is formed at a higher temperature than the first layer (12).