| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten the time required for conditioning an ion-exchange resin and to reduce the using amount of ultrapure water. <P>SOLUTION: In a conditioning method of the ion-exchange resin for removing impurities from the ion-exchange resin, the ion-exchange resin is preliminarily washed using gas dissolved water obtained by dissolving an inorganic gas such as an ozone gas, a nitrogen gas, a hydrogen gas or an oxygen gas into the ultrapure water, and ultrasonic vibrations are added as needed at the time. After the preliminary washing process, the ion-exchange resin is washed with the ultrapure water. <P>COPYRIGHT: (C)2010,JPO&INPIT |
