| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device, in which guide rails are kept horizontal along the whole length of them, so that movable members are stably movable even on a large-sized device. SOLUTION: The guide rail 17 is fixed to an installation surface 25a of an adjust plate 25, and the height position of the adjust plate 25 is adjusted by a height adjusting mechanism 26. In the case where there is a part where the guide rail 17 is not kept horizontal in the length direction, a tightening quantity to a height adjusting screw 27 of the height adjusting mechanism 26 provided close to the part is adjusted to adjust the height position of the adjust plate 25 to a top plate 10. The height position of the guide rail 17 is thus finely adjusted. The adjustment is performed along the whole length of the guide rail 17. COPYRIGHT: (C)2010,JPO&INPIT |
