| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of removing hydrocarbon-based molecules and the like with high resolution kept while suppressing image drift associated with temperature change being a throughput lowering factor. SOLUTION: As one embodiment for solving the above problem, it is proposed that a cold trap plate to be arranged in a sample chamber of this charged particle device is arranged in a space outside movement ranges of a sample state and a sample, and excluding a space formed between a plane coincident with a movement track on a sample surface and a surface parallel to the movement track and contacting a sample side end of an object lens. It is also proposed that the trap plate is arranged away from the inner wall of the sample chamber, or the trap plate is arranged in a part of the inner wall of the sample chamber to be thermally separated from the inner wall of the sample chamber. COPYRIGHT: (C)2010,JPO&INPIT
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