| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray source 11, capable of solving problems about electrode 31, such as stagnation of gas around it 31, difficulty of wiring to it 31, and high cost, with its performance and functions maintained. Ž<P>SOLUTION: The electrodes 31 of an electrostatic lens 17 are pinched and held by two insulating plates 33. The insulating plates 33 are equipped with grooves 34, which join the electrodes 31 through a brazing material 35. When the electrodes 31 are joined to two insulating plates 33, the electrodes 31 are held with a jig to keep their axial and parallel accuracy, and then connected to the two insulating plates 33. Since both sides of the electrodes 31 intersecting an arrangement direction of the insulating plates 33 are made open, gas emitted from the electrodes 31 resulting from incident electron beams 15 hardly collects between the electrodes 31, and further, wiring for electrodes is also facilitated. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
