| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensitive sensor for facilitating pressure detection by preventing excessive reduction in resistivity between a pair of electrodes by a tunnel barrier between the electrodes and a pressure sensitive conductive layer. Ž<P>SOLUTION: This pressure sensitive sensor comprises a substrate 7 having a pair of electrodes 5 and 6, and the pressure sensitive conducting layer 8 where the pair of electrodes 5 and 6 in the substrate 7 and the gap between the pair of electrodes 5 and 6 are covered and tunnel current flows between conductive particles, included inside following the application of the pressure to change the insulation state to the current-carrying state. The insulation layer 9 with a thickness that allows the tunnel current flow to be interposed in between the electrodes 5 and 6 and the pressure sensitive conducting layer 8. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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