发明名称 Method and System for Creating Photosensitive Array with Integrated Backplane
摘要 A method of fabricating a photoactive array having an integrated backplane is provided. The layers of the device may be stamped or deposited on a planar or a curved substrate, such as a semispherical or ellipsoidal substrate. Each metal layer may be stamped using an elastomeric stamp and a vacuum mold. By depositing the patterned and full-surface layers in a single process, a photosensitive array with an integrated transistor backplane may be fabricated, resulting in improved sensitivity and performance.
申请公布号 US2009261394(A1) 申请公布日期 2009.10.22
申请号 US20090366839 申请日期 2009.02.06
申请人 THE REGENTS OF THE UNIVERSITY OF MICHIGAN 发明人 FORREST STEPHEN R.
分类号 H01L31/10;H01L31/18 主分类号 H01L31/10
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